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2017-05-24 18:55 |
【作者】N. V. Gavrilov, G. A. Mesyats,
【文章标题】New broad beam gas ion source for industrial application
【期刊名，年份，卷（期），起止页*****】Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 14, 1050 (1996)
【全文链接】http://avs.scitation.org/doi/10.1116/1.580132 |
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