【作者】E. B. KluyenkovA. E. PestovV. N. Polkovnikov 【文章标题】Testing and correction of optical elements with subnanometer precision 【期刊名,年份,卷(期),起止页*****】Nanotechnologies in Russia October 2008, Volume 3, Issue 9, pp 602–610 【全文链接】https://link.springer.com/article/10.1134/S1995078008090103